- 尺寸緊湊
- 可安裝在各種位置
- 的 TEOS 汽化系統(tǒng)
- 結(jié)合 SEF 或 LF,可實現(xiàn)數(shù)字控制
- 無需特殊鼓泡罐或汽化罐
- DeviceNetTM 型產(chǎn)品系列
- 符合 RoHS 標(biāo)準(zhǔn)
VC 系列能夠在無載氣的情況下快速汽化純水或其他液體源,組建更緊湊的汽化系統(tǒng)。
HORIBA 可為您提供由 VC 系列和您需要的所有其他組件組成的定制汽化系統(tǒng):
特征:
技術(shù)參數(shù):
Model | VC-1420 |
| |
Flow rate generated*1 (During TEOS generation) | Max. 5.0 CCM conversion (liquid phase conversion) |
| |
Liquids supported | TEOS, P(OCH3)3, C6F6 | ||
Temperature rise | Max. 150°C | ||
Pressure generated*1 | Reduced pressure | ||
External leak integrity | 1.0x10-8Pa·m3/s | ||
Internal Leak Integrity | 1.0x10-6Pa·m3/s | ||
Wetted mateliar | 316L Stainless Steel ( polished surface ) | ||
Internal heater volume | AC 100V to 120V 70W(35Wx2) | ||
Temperature sensor used | Thermocouple K type (CA) | ||
Pressure Resistance | 1.0MPa(G) | ||
Standard Fitting | Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female |
| |
*1 Varies depending on the type of liquid. |
| ||
*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa). |
*您想獲取產(chǎn)品的資料:
個人信息: