美國布魯克斯BROOKS SLA5853S

Brooks SLA5800 series elastomer sealed digital thermal mass flow meters/controllers offer unparalleled flexibility and performance.   They offer faster response, better accuracy (1% of reading) and improved control over traditional analog devices.  Industry leading repeatability ensures a stable process even under changing conditions.  Self diagnostics and alarms eliminate downtime.  Digital communication includes FOUNDATION Fieldbus and DeviceNet.