用途:DIC95微分干涉顯微鏡,可選配微分干涉物鏡,光源可選LED和光纖冷光源,物鏡上方的DIC棱鏡可作水平和上下微調(diào),兩個(gè)方向的線偏振光分合所形成的浮雕圖像,適合于芯片封裝后的品檢很微小的突起,細(xì)微劃痕的觀察,測(cè)量.
物鏡規(guī)格:
f=200mm用全平場(chǎng)復(fù)消色差物鏡/M Plan APO | ||||||
物鏡數(shù)據(jù) | ||||||
倍率 | 2X | 5X | 10X | 20X | 50X | 100X |
NA | 0.055 | 0.14 | 0.28 | 0.42 | 0.55 | 0.55 |
W.D(mm) | 34 | 34 | 33.5 | 20 | 13 | 13 |
焦點(diǎn)距離(mm) | 100 | 40 | 20 | 10 | 4 | 2 |
分解率(µm) | 5 | 2 | 1 | 0.7 | 0.5 | 0.5 |
焦深(µm) | 91 | 14 | 3.58 | 1.6 | 0.9 | 0.9 |
寬視野2/3”sensor(mm) | 4.4 *3.3 | 1.76*1.32 | 0.88*0.66 | 0.44* 0.33 | 0.176*0.132 | 0.088*0.066 |
寬視野1/2sensor(mm) | 3.2 * 2.4 | 1.28*0.96 | 0.64* 0.48 | 0.32*0.24 | 0.128*0.096 | 0.064 *0.048 |